The effect of substrate electrical potential on the composition and structure of deposited condensate in the ion-plasma process of NiCrAl coating

Budinovskiy S.A., Benklyan A.S., Azarovskiy E.N., Tatarnikov S.V.
Budinovskiy S.A., Benklyan A.S., Azarovskiy E.N., Tatarnikov S.V. The effect of substrate electrical potential on the composition and structure of deposited condensate in the ion-plasma process of NiCrAl coating // Proceedings of VIAM. 2026. No. 5. DOI: 10.18577/2307-6046-2026-0-5-94-102. URL: https://test.viam.ru/en/journal/2026/5/7
Keywords
heat-resistant nickel alloys, ion-plasma coatings, vacuum arc process
Abstract

The results of a study examining the effect of substrate electrical potential in the range from 0 to 150 V on the structure and composition of NiCrAl coatings alloyed with refractory metals (Ta, Hf, and Re) are presented. It is shown that the deposition rate of all three selected coating alloys decreases linearly with increasing substrate electrical potential, reaching zero at approximately 200 V. This is due to the presence of high-energy, multiply charged metal ions in the vacuum arc discharge plasma. The elemental composition of the condensate also changes with increasing substrate electrical potential.

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