An influence of the magnetic field distribution on properties of ITO coating deposited on a polymer film by reactive magnetron sputtering method

Khokhlov Y.A., Bogatov V.A., Krynin A.G.
UDC
629.7.023.222
DOI
10.18577/2307-6046-2014-0-12-11-11
Article PDF (Russian) (587.56 KB)
How to cite
Khokhlov Y.A., Bogatov V.A., Krynin A.G. An influence of the magnetic field distribution on properties of ITO coating deposited on a polymer film by reactive magnetron sputtering method // Proceedings of VIAM. 2014. No. 12. DOI: 10.18577/2307-6046-2014-0-12-11-11. URL: https://test.viam.ru/en/journal/2014/12/11
Abstract

Distribution of magnetic field induction over the surface of a planar magnetron target and its influence on properties uniformity of ITO coating produced by reactive magnetron deposition on polymer substrate with a width of 600 mm is hereby investigated. It was shown that the distribution alignment of the magnetic field induction in the sputtering zone of magnetron target allows to increase uniformity of thickness and electric properties of ITO coating deposited on a large-sized polymer film. Research trends to improve the technology of reactive magnetron deposition on the large-sized polymer substrate are hereby described.

Reference list
  1. Kablov E.N. Strategicheskie napravlenija razvitija materialov i tehnologij ih pererabotki na period do 2030 goda [Strategic directions of development of materials and technologies to process them for the period up to 2030] //Aviacionnye materialy i tehnologii. 2012. №S. S. 7–17.
  2. Kablov E.N. Aviakosmicheskoe materialovedenie [Aerospace Materials] //Vse materialy. Jenciklopedicheskij spravochnik. 2008. №3. S. 2–14.
  3. Kablov E.N. Aviacionnoe materialovedenie v XXI veke. Perspektivy i zadachi [Aeronautical Materials in the XXI century. Prospects and Challenges] /V kn. Aviacionnye materialy. Izbrannye trudy «VIAM» 1932–2002. M.: MISiS–VIAM. 2002. S. 23–47.
  4. Krynin A.G., Hohlov Ju.A., Bogatov V.A., Kisljakov P.P. Prozrachnye interferencionnye pokrytija dlja funkcional'nyh materialov osteklenija [Transparent interference coatings for functional materials glazing] //Trudy VIAM. 2013. №11. St. 05 (viam-works.ru).
  5. Bogatov V.A., Kondrashov S.V., Hohlov Ju.A. Mnogofunkcional'nye opticheskie pokrytija i materialy [Multifunctional optical coatings and materials] //Aviacionnye materialy i tehnologii. 2012. №S. S. 343–348.
  6. Hohlov Ju.A., Krynin A.G., Kisljakov P.P., Jurkov G.Ju. Proektirovanie steklopaketov, jekranirujushhih radiochastotnoe izluchenie [Design of double-glazed windows, radio-frequency radiation shielding] //Zhilishhnoe stroitel'stvo. 2013. №12. S. 34–36.
  7. Bogatov V.A., Hohlov Ju.A. Mnogofunkcional'nye opticheskie pokrytija, poluchaemye metodami plazmennoj tehnologii, i sposoby kontrolja ih optiko-fizicheskih harakteristik [Multifunctional optical coatings produced by plasma technology, and how to control their optical and physical characteristics] //Aviacionnye materialy i tehnologii. 2001. №1. S. 93–99.
  8. Kisljakov P.P., Hohlov Ju.A., Krynin A.G., Kondrashov S.V. Poluchenie i primenenie polimernoj plenki s prozrachnym jelektroprovodjashhim pokrytiem na osnove oksida indija, legirovannogo olovom [Preparation and use of a polymer film coated with a transparent conductive indium oxide doped with tin] //Trudy VIAM. 2013. №11. St. 06 (viam-works.ru).
  9. Gorjanca T.C., Leonga D., Py C., Rotha D. Room temperature deposition of ITO using r.f. magnetron sputtering //Thin Solid Films. 2002. V. 413. P. 181–185.
  10. Mientus R., Ellmer K. Reactive magnetron sputtering of tin-doped indium oxide (ITO): influence of argon pressure and plasma excitation mode //Surface and Coatings Technology. 2001. V. 142–144. P. 748–754.
  11. Kuz'michev A.I. Magnetronnye raspylitel'nye sistemy. Kn. 1. Vvedenie v fiziku i tehniku magnetronnogo raspylenija [Magnetron sputtering system. Vol. 1. Introduction to the physics and technology of magnetron sputtering]. K.: Avers. 2008. 244 s.
  12. Hohlov Ju.A., Krynin A.G., Bogatov V.A., Kisljakov P.P. Opticheskie konstanty tonkih plenok oksida indija, legirovannogo olovom, osazhdennyh na polijetilentereftalatnuju plenku metodom reaktivnogo magnetronnogo raspylenija (blizhnjaja infrakrasnaja oblast' spektra) [The optical constants of thin films of indium oxide doped with tin deposited on PET film by reactive magnetron sputtering (NIR)] //Aviacionnye materialy i tehnologii. 2013. №1. S. 24–28.
  13. Bogatov V.A., Kondrashov S.V., Hohlov Ju.A. Poluchenie gradientnogo pokrytija oksinitrida aljuminija metodom reaktivnogo magnetronnogo raspylenija [Getting gradient coating aluminum oxynitride by reactive magnetron sputtering] //Aviacionnye materialy i tehnologii. 2010. №3. S. 19–21.
  14. Kurdesau F., Khripunov G., da Cunha A.F. et al. Comparative study of ITO layers deposited by DC and RF magnetron sputtering at room temperature //Journal of Non-Crystalline Solids. 2006. V. 352. №19–20. P. 1466–1470.
  15. Jeong S.H., Lee J.W., Lee S.B., Boo J.H. Deposition of aluminum-doped zincoxide films by RF magnetron sputtering and study of their structural, electrical and optical properties //Thin Solid Films. 2003. V. 435. P. 78–82.
  16. Bogatov V.A., Zaharov S.S., Kisljakov P.P. i dr. Vlijanie rezhimov magnetronnogo napylenija na optiko-fizicheskie svojstva mednyh nanopokrytij [Influence of magnetron sputtering on the optical and physical properties of nano-copper] //Nanomaterialy i nanotehnologii. 2011. №4. S. 45–53.
  17. Marchenko V.A. Processy na poverhnosti misheni pri reaktivnom raspylenii V v Ar–O2 sredah [Processes on the target surface during reactive sputtering V in Ar–O2 environments] //Izvestija RAN. Serija fizicheskaja. 2009. T. 73. №7. S. 920–923.
  18. Hohlov Ju.A., Bogatov V.A., Berezin N.M. Stabilizacija reaktivnogo magnetronnogo osazhdenija magnitnym polem [Stabilization of reactive magnetron sputtering magnetic field] //Fizika i himija obrabotki materialov. 2012. №5. S. 46–50.
  19. Komlev A.E., Shapovalov V.I., Shutova N.S. Magnetronnyj razrjad v srede argona i kisloroda pri osazhdenii plenki oksida titana [Magnetron discharge in argon and oxygen in the deposition of titanium oxide films] //ZhTF. 2012. T. 82. №7. S. 134–136.
  20. Bogatov V.A., Hohlov Ju.A., Sytyj Ju.V., Zhadova N.S. Vlijanie obrabotki v razrjade s zamknutym drejfom jelektronov na adgezionnye svojstva i prochnost' kleevyh soedinenij polimerov [The effect of treatment in the discharge with closed electron drift on the adhesive properties and bonding strength polymers] //Klei. Germetiki. Tehnologii. 2011. №9. S. 27–31.
  21. Krynin A.G., Hohlov Ju.A. Opticheskie harakteristiki termostabilizirovannoj polijetilen-tereftalatnoj plenki, ispol'zuemoj dlja funkcional'nyh materialov osteklenija [Optical characteristics thermostabilized polyethylene terephthalate film used for functional materials glazing] //Aviacionnye materialy i tehnologii. 2013. №4. S. 31–34.
  22. Krylova T.N. Interferencionnye pokrytija [Interference coatings]. L.: Mashinostroenie. 1973. 224 s.