Reactive magnetron deposition of ITO coating on the polymer film using a sectionalized gas feed system

Khokhlov Y.A., Bogatov V.A., Berezin N.M., Krynin A.G.
UDC
629.7.023.222
DOI
10.18577/2307-6046-2015-0-5-7-7
Article PDF (Russian) (459.59 KB)
How to cite
Khokhlov Y.A., Bogatov V.A., Berezin N.M., Krynin A.G. Reactive magnetron deposition of ITO coating on the polymer film using a sectionalized gas feed system // Proceedings of VIAM. 2015. No. 5. DOI: 10.18577/2307-6046-2015-0-5-7-7. URL: https://test.viam.ru/en/journal/2015/5/7
Abstract

The distribution of thickness and properties (transmission coefficient, surface resistance) of an ITO coating fabricated by the reactive magnetron deposition on a polymer film using a sectionalized reactive gas feed system was investigated. It was shown that the uniformity of coating thickness and properties can be enhanced by optimizing the oxygen flow rate through different sections of the gas feed system.

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