Formation of carbon coatings in the process of methane pyrolysis by the chemical vapor deposition

Sidorov D.V., Grunin А.А., Shavnev A.A.
UDC
621.763
DOI
10.18577/2307-6046-2023-0-10-105-118
Article PDF (Russian) (1.19 MB)
How to cite
Sidorov D.V., Grunin А.А., Shavnev A.A. Formation of carbon coatings in the process of methane pyrolysis by the chemical vapor deposition // Proceedings of VIAM. 2023. No. 10. DOI: 10.18577/2307-6046-2023-0-10-105-118. URL: https://test.viam.ru/en/journal/2023/10/10
Keywords
methane pyrolysis, pyrolytic carbon, chemical reaction, reagent
Abstract

The article presents a review of the scientific and technical literature in the field of methane pyrolysis in the process of chemical vapor deposition of pyrolytic carbon, summarizes the results of studies of the process depending on the parameters of deposition and the substrates used, analyzes the compositions of pyrolysis products, mechanisms and pathways of chemical reactions.

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