Polytype modifications of silicon carbide in coatings

Sidorov D.V., Shavnev A.A.
UDC
666.7
DOI
10.18577/2307-6046-2026-0-5-113-122
Article PDF (Russian) (1.03 MB)
How to cite
Sidorov D.V., Shavnev A.A. Polytype modifications of silicon carbide in coatings // Proceedings of VIAM. 2026. No. 5. DOI: 10.18577/2307-6046-2026-0-5-113-122. URL: https://test.viam.ru/en/journal/2026/5/9
Keywords
silicon carbide, polytype modification, crystal, transformation, producing, application
Abstract

The article presents a review of scientific and technical literature in the field of crystalline coatings of silicon carbide of various polytype modifications and methods for their production. The paper examines promising areas of application for the most common crystalline polytypic modifications of silicon carbide, which include dark matter detectors and biosensors, in addition to power devices and microelectronics. Approaches to studying the preferential formation of one or another polytype of silicon carbide in crystalline coatings are described.

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