Influence of biaxial strain on the properties of the transparent conductive coating deposited on PET film by reactive magnetron sputtering

Bogatov V.A., Krynin A.G., Popkov O.V., Khokhlov Y.A.
Bogatov V.A., Krynin A.G., Popkov O.V., Khokhlov Y.A. Influence of biaxial strain on the properties of the transparent conductive coating deposited on PET film by reactive magnetron sputtering // Proceedings of VIAM. 2016. No. 1. DOI: 10.18577/2307-6046-2016-0-1-42-49. URL: https://test.viam.ru/en/journal/2016/1/6
Abstract

Research results of effect of biaxial deformation on electrical and optical properties of polyethylene terephthalate (PET) films with a transparent conductive coating of indium oxide alloyed by е tin (ITO) obtained by magnetron sputtering as a part of the organic triplex produced by a method of autoclave formation are presented. Suggestions on main causes of changes in resistance of the samples in the cyclic biaxial strain and subsequent relaxation are proposed.

Reference list
  1. Kablov E.N. Innovacionnye razrabotki FGUP «VIAM» GNC RF po realizacii «Strategicheskih napravlenij razvitiya materialov i tehnologij ih pererabotki na period do 2030 goda» [Innovative developments of FSUE «VIAM» SSC of RF on realization of «Strategic directions of the development of materials and technologies of their processing for the period until 2030»] // Aviacionnye materialy i tehnologii. 2015. №1 (34). S. 3–33.
  2. Kablov E.N. Materialy i himicheskie tehnologii dlya aviacionnoj tehniki [Materials and chemical technologies for aviation engineering] // Vestnik Rossijskoj akademii nauk. 2012. T. 82. №6. S. 520–530.
  3. Kablov E.N. Shestoj tehnologicheskij uklad [Sixth technological way] // Nauka i zhizn. 2010. №4. S. 2–7.
  4. Kablov E.N. Aviakosmicheskoe materialovedenie [Aerospace materials science] // Vse materialy. Enciklopedicheskij spravochnik. 2008. №3. S. 2–14.
  5. Kablov E.N. Aviacionnoe materialovedenie v XXI veke. Perspektivy i zadachi [Aviation materials science in the XXI century. Perspectives and tasks] / V sb.: Aviacionnye materialy. Izbrannye trudy «VIAM» 1932–2002: yubilejnyj nauch.-tehnich. sb. M.: MISiS–VIAM, 2002. S. 23–47.
  6. Krynin A.G., Hohlov Yu.A., Bogatov V.A., Kislyakov P.P. Prozrachnye interferencionnye pokrytiya dlya funkcionalnyh materialov ostekleniya [Transparent interferential coatings for functional materials of glazing] // Trudy VIAM: elektron. nauch.-tenhich. zhurn. 2013. №11. St. 05. Available at: http://www.viam-works.ru (accessed: Month, data 2015).
  7. Bogatov V.A., Kondrashov S.V., Hohlov Yu.A. Mnogofunkcionalnye opticheskie pokrytiya i materialy [Multifunction optical coatings and materials] // Aviacionnye materialy i tehnologii. 2012. №S. S. 343–348.
  8. Bogatov V.A., Hohlov Ju.A. Mnogofunkcionalnye opticheskie pokrytija, poluchaemye metodami plazmennoj tehnologii, i sposoby kontrolja ih optiko-fizicheskih harakteristik / V sb. Aviacionnye materialy i tehnologii. Vyp. «Metody ispytanij i kontrolja kachestva metallicheskih i nemetallicheskih materialov». M. : VIAM, 2001. S. 93–99.
  9. Kislyakov P.P., Hohlov Yu.A., Krynin A.G., Kondrashov S.V. Poluchenie i primenenie polimernoj plenki s prozrachnym elektroprovodyashhim pokrytiem na osnove oksida indiya, legirovannogo olovom [Receiving and application of polymer film with transparent electroconducting coating on the basis of the indium oxide alloyed by tin] // Trudy VIAM: elektron. nauch.-tenhich. zhurn. 2013. №11. St. 06. Available at: http://www.viam-works.ru (accessed: Month, data 2015).
  10. Suzdalev I.P. Nanotehnologiya. Fiziko-himiya nanoklasterov, nanostruktur i nanomaterialov [Fiziko-himiya nanoclusters, nanostructures and nanomaterials]. M.: KomKniga, 2006. 589 s.
  11. Ivanchev S.S., Ozerin A.N. Nanostruktury v polimernyh sistemah [Nanostructures in polymeric systems] // Vysokomolekulyarnye soedineniya. Ser. B. 2006. T. 48. №8. S. 1531–1535.
  12. Volynskij A.L., Panchuk D.A., Sadakbaeva Zh.K., Bolshakova A.V., Yarysheva L.M., Bakeev N.F. Ob ocenke deformacionno-prochnostnyh svojstv poverhnostnyh sloev polimerov, podvergnutyh obrabotke v plazme [About assessment of deformation and strength properties of surface layers of the polymers subjected to processing in plasma] // Himiya vysokih energij. 2010. T. 44. №4. S. 369–372.
  13. Volynskij A.L., Panchuk D.A., Moiseeva S.V., Kechekyan A.S., Yarysheva L.M., Bakeev N.F. Vliyanie harakteristicheskoj defektnosti na prochnost nanosloev metallov, nanesennyh na poverhnost polimerov [Influence of characteristic deficiency on durability of nanolayers of the metals brought on surface of polymers] // Doklady Rossijskoj akademii nauk. 2008. T. 418. №5. S. 638–642.
  14. Panchuk D.A., Sadakbaeva Zh.K., Puklina E.A. i dr. O strukture mezhfaznogo sloya na granice metallicheskoe pokrytie–polimernaya podlozhka [About structure of interphase layer on border metal covering – polymeric substrate] // Rossijskie nanotehnologii. 2009. T. 4. №5–6. S. 114–120.
  15. Kuzmichev A.I. Magnetronnye raspylitelnye sistemy. Kn. 1. Vvedenie v fiziku i tehniku magnetronnogo raspyleniya [Magnetronnye spraying systems. Book 1. Introduction in physics and equipment of magnetron sputtering]. Kiev: Avers. 2008. 244 s.
  16. Hohlov Yu.A., Bogatov V.A., Berezin N.M. Stabilizaciya reaktivnogo magnetronnogo osazhdeniya magnitnym polem [Stabilization of reactive magnetronny sedimentation by magnetic field] // Fizika i himija obrabotki materialov. 2012. №5. S. 46–50.
  17. Gorjanca T.C., Leonga D., Py C., Rotha D. Room temperature deposition of ITO using r.f. magnetron sputtering // Thin Solid Films. 2002. V. 413. P. 181–185.
  18. Khokhlov Yu.A., Berezin N.M., Bogatov V.A., Krynin A.G. Reaktivnoe magnetronnoe osazhdenie oksida indiya, legirovannogo olovom, s kontrolem rabochego davleniya [Reactive magnetron deposition of indium oxide alloyed with tin with the use of operating pressure control] // Aviacionnye materialy i tehnologii. 2015. №3 (36). S. 53–56. DOI: 10.18577/2071-9140-2015-0-3-60-63.
  19. Mientus R., Ellmer K. Reactive magnetron sputtering of tin-doped indium oxide (ITO): influence of argon pressure and plasma excitation mode // Surface and Coatings Technology. 2001. V. 142–144. P. 748–754.
  20. Khokhlov Yu.A., Berezin N.M., Bogatov V.A., Krynin A.G., Popkov O.V. Kontrol reaktivnogo osazhdeniya ITO pokrytiya po emissionnomu spektru plazmy magnetronnogo razryada [Control of reactive deposition of ITO coating on the emission spectrum of the plasma magnetron discharge] // Aviacionnye materialy i tehnologii. 2015. №4 (37). S. 67–71. DOI: 10.18577/2071-9140-2015-0-4-67-71.
  21. Khokhlov Yu.A., Bogatov V.A, Krynin A.G. Vliyanie raspredeleniya magnitnogo polya na svojstva ITO pokrytiya, poluchaemogo na polimernoj plenke metodom reaktivnogo magnetronnogo osazhdeniya [An influence of the magnetic field distribution on properties of ITO coating deposited on a polymer film by reactive magnetron sputtering method] // Trudy VIAM: elektron. nauch.-tenhich. zhurn. 2014. №12. St. 11. Available at: http://www.viam-works.ru (accessed: Month, data 2015). DOI: 10.18577/2307-6046-2014-0-12-11-11.
  22. Krylova T.N. Interferencionnye pokrytiya [Interferential coverings]. L.: Mashinostroenie, 1973. 224 s.
  23. Krynin A.G., Khokhlov Yu.A. Opticheskie harakteristiki termostabilizirovannoj polietilentereftalatnoj plenki, ispolzuemoj dlya funkcionalnyh materialov ostekleniya [Optical performances thermostabilised polyethyleneterephtalaten film used for the functional materials of a glass cover] // Aviacionnye materialy i tehnologii. 2013. №4. S. 31–34.
  24. Khokhlov Yu.A., Krynin A.G., Bogatov V.A., Kislyakov P.P. Opticheskie konstanty tonkih plenok oksida indiya, legirovannogo olovom, osazhdennyh na polietilentereftalatnuyu plenku metodom reaktivnogo magnetronnogo raspyleniya (blizhnyaya infrakrasnaja oblast spektra) [Optical constants of thin indium oxide films, alloyed by tin and deposited onto polyethylene terephthalate film by the reactive magnetron sputtering method (spectrum infrared short-range region)] // Aviacionnye materialy i tehnologii. 2013. №1. S. 24–28.