Electrophysical, optical and hydrophobic properties of magnetron sputtered indium tin oxide thin films

Sorokin I.A., Mekalina I.V.
UDC
666.1.056.8:539.231
DOI
10.18577/2307-6046-2026-0-5-103-112
Article PDF (Russian) (1.32 MB)
How to cite
Sorokin I.A., Mekalina I.V. Electrophysical, optical and hydrophobic properties of magnetron sputtered indium tin oxide thin films // Proceedings of VIAM. 2026. No. 5. DOI: 10.18577/2307-6046-2026-0-5-103-112. URL: https://test.viam.ru/en/journal/2026/5/8
Keywords
indium tin oxide, magnetron sputtering, transparent conducting coatings, low-emissivity coatings, hydrophobic coatings
Abstract

 Indium tin oxide (ITO) thin films are widely spread due to their high visible transparency and relatively low resistivity. Deposition at room temperature with thorough parameters optimization is required to obtain such coatings on flexible polymer substrates. Current research presents the results of ITO thin films obtaining on polyethylene terephthalate and glass substrates by magnetron sputtering. The influence of oxygen flow on coating’s resistivity, spectral optical characteristics and hydrophobic properties are investigated.

Reference list
  1. Rebohle L., Prucnal S., Reichel D. Flash Lamp Annealing. From Basics to Applications. Cham: Springer Nature Switzerland, 2019, 288 p. DOI: 10.1007/978-3-030-23299-3.
  2. Gordon R.G. Criteria for choosing transparent conductors. MRS Bulletin, 2000, vol. 25, no. 8, pp. 52–57. DOI: 10.1557/mrs2000.151.
  3. Budinovskiy S.A., Doronin O.N., Kosmin A.A., Benklyan A.S. Influence of the state of the YSZ target on its sputtering rate during deposition of a TBC ceramic layer by the UOKS-3 unit. Aviation materials and technologies, 2021, no. 2 (63), pp. 85–92. Available at: http://www.journal.viam.ru (accessed: August 01, 2025). DOI: 10.18577/2713-0193-2021-0-2-85-92.
  4. Sorokin I.A., Solovyanchik L.V., Mekalina I.V., Tsapenko A.N. Optically transparent polymer films with anti-reflective coating. Trudy VIAM, 2025, no. 2 (144), pp. 89–99. Available at: http://www.viam-works.ru (accessed: August 01, 2025). DOI: 10.18577/2307-6046-2025-0-2-89-99.
  5. Tseng K.S., Lo Y.L. Effect of sputtering parameters on optical and electrical properties of ITO films on PET substrates. Applied surface science, 2013, vol. 285, pp. 157–166. DOI: 10.1016/j.apsusc.2013.08.024.
  6. Liu H., Wang L., Lin G., Feng Y. Recent progress in the fabrication of flexible materials for wearable sensors. Biomaterials Science, 2022, vol. 10, no. 03, pp. 614–632. DOI: 10.1039/d1bm01136g.
  7. Zuev A.V., Zarichnyak Yu.P., Barinov D.Ya., Krasnov L.L. Measurement of thermophysical properties of flexible thermal insulation. Aviation materials and technology, 2021, no. 1 (62), pp. 119–126. Available at: http://www.journal.viam.ru (accessed: August 02, 2025). DOI: 10.18577/2713-0193-2021-0-1-119-126.
  8. Babashov V.G., Stepanova E.V., Zimichev A.M., Basargin O.V. Oxide continuous fibers as a part of flexible high temperature insulation. Aviation materials and technology, 2021, no. 1 (62), pp. 34–43. Available at: http://www.journal.viam.ru (accessed: August 02, 2025). DOI: 10.18577/2713-0193-2021-0-1-34-43.
  9. Khachatryan H., Kim D.J., Kim M., Kim H.K. Roll-to-Roll fabrication of ITO thin film for flexible optoelectronics applications: The role of post-annealing. Materials Science in Semiconductor Processing, 2018, vol. 88, pp. 51–56. DOI: 10.1016/j.mssp.2018.07.033.
  10. Kim Y., Park S., Kim S. et al. Flash lamp annealing of indium tin oxide thin-films deposited on polyimide backplanes. Thin Solid Films, 2017, vol. 628, pp. 88–95. DOI: 10.1016/j.tsf.2017.03.016.
  11. Facchetti A., Marks T. Transparent electronics: from synthesis to applications. New-York: John Wiley & Sons, 2010, 452 p. DOI: 10.1002/9780470710609.
  12. Guillén C., Herrero J. Structure, optical, and electrical properties of indium tin oxide thin films prepared by sputtering at room temperature and annealed in air or nitrogen. Journal of applied physics, 2007, vol. 101, no. 7, р. 073514. DOI: 10.1063/1.2715539.
  13. David C., Tinkham B.P., Prunici P., Panckow A. Highly conductive and transparent ITO films deposited at low temperatures by pulsed DC magnetron sputtering from ceramic and metallic rotary targets. Surface and Coatings Technology, 2017, vol. 314, pp. 113–117. DOI: 10.1016/j.surfcoat.2016.09.022.
  14. Txintxurreta J., G-Berasategui E., Ortiz R. et al. Indium tin oxide thin film deposition by magnetron sputtering at room temperature for the manufacturing of efficient transparent heaters. Coatings, 2021, vol. 11, no. 1, p. 92. DOI: 10.3390/coatings11010092.
  15. Besbes S., Ouada H.B., Davenas J. et al. Effect of surface treatment and functionalization on the ITO properties for OLEDs. Materials Science and Engineering: C, 2006, vol. 26, no. 2–3, pp. 505–510. DOI: 0.1016/j.msec.2005.10.078.
  16. Ozbay S., Erdogan N., Erden F. et al. Surface free energy and wettability properties of transparent conducting oxide-based films with Ag interlayer. Applied Surface Science, 2021, vol. 567, p. 150901. DOI: 10.1016/j.apsusc.2021.15090.
  17. Aksenova V.V., Smirnova I.P., Markov L.K., Pavlyuchenko A.S., Kolokolov D.S., Volkov D.Yu., Wettability of transparent conductive nanostructured ITO and ITO/Al2 O3 coatings. St. Petersburg State Polytechnical University Journal. Ser.: Physics and Mathematics, 2023, vol. 16 (1.1), рр. 404–410. DOI: 10.18721/JPM.161.169.
  18. Salakhova R.K., Veshkin E.A., Sudin Yu.I., Barannikov A.A. Effect of roughness on surface-energy characteristics and wetting properties of fiberglass. Aviation materials and technologies, 2025, no. 2 (79), pp. 48–58. Available at: http://www.journal.viam.ru (accessed: August 02, 2025). DOI: 10.18577/2713-0193-2025-0-2-48-58.
  19. Kablov E.N. Innovative developments of FSUE «VIAM» SSC of RF on realization of «Strategic directions of the development of materials and technologies of their processing for the period until 2030». Aviacionnye materialy i tehnologii, 2015, no. 1 (34), pp. 3–33. DOI: 10.18577/2071-9140-2015-0-1-3-33.
  20. Cesaria M., Caricato A.P., Martino M. Realistic absorption coefficient of ultrathin films. Journal of Optics, 2012, vol. 14, no. 10, p. 105701. DOI: 10.1088/2040-8978/14/10/105701.
  21. Shamsuddin W.N.S.W., Zuber K., Murphy P.J., Jane M.L. Environmental durability of soft low-e coatings: A review. Solar Energy Materials and Solar Cells, 2024, vol. 266, p. 112673. DOI: j.solmat.2023.112673.
  22. Horprathum M., Eiamchai P., Limnonthakul P. et al. Structural, optical and hydrophilic properties of nanocrystalline TiO2 ultra-thin films prepared by pulsed dc reactive magnetron sputtering. Journal of alloys and compounds, 2011, vol. 509, no. 13, pp. 4520–4524. DOI: j.jallcom.2011.01.038.